MEMS
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Optimization of Process Parameters for AISI 304 Using Micro-EDM Drilling Process: A Review
Abstract: Today, a variety of microparts are needed to fabricate high-tech items including MEMS applications and micro-electronic parts. The advancement of micromachining technology becomes ever more important in order to produce these micro parts. The creation of accurate holes and pins is one of themultiple processes in the micromachining process that is necessary for many small components. In order to create deeper, more straight holes, micro-hole drilling is utilized in a …
Published in Journal of Materials & Metallurgical Engineering · Vol. 13, Issue 3, 2023 · pp. 26–37 Read article
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Analogous Electrical Modelling of Squeeze Film Damping in MEMS Accelerometers
Abstract: Most of the MEMS (microelectromechanical systems) structures employ parallel plates or beams. A very thin film of air or some other gas in between their suspended structure and fixed substrate is trapped in between these plates. This results in squeeze film damping. Though, FEM (Finite element method) analysis is the most widely used method for studying the effects of the phenomenon, it becomes quite cumbersome and time consuming while analyzing …
Published in Journal of Mechatronics and Automation · Vol. 2, Issue 1, 2015 · pp. 1–9 Read article
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The Impact of MEMS on the Internet of Things (IoT)
Abstract: Our daily lives, workdays, and connections with the external world are all being impacted by theInternet of Things (IoT). Micro Electro-Mechanical Systems (MEMS) are tiny, economical, andpretty accurate sensors that can measure a variety of physical variables, including temperature,pressure, humidity, acceleration, and more. They are a fundamental enabler of this technology. Inthis article, we examine the effects of MEMS on the IoT and the ways in which these incrediblysmall sensors …
Published in Trends in Mechanical Engineering & Technology · Vol. 12, Issue 3, 2022 · pp. 34–38 Read article
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Design and Analysis of Smart Stents Using MEMS Pressure Sensors
Abstract: In modern day medicine, stents are a commonly used device for patients with cardiovascular diseases.There is however no accurate method of monitoring its working and ensuring that the stent is able to prevent any further blockages. Stents can also cause issues like restenosis and thrombosis, which if not treated immediately can have serious repercussions for the patient. This project aims at understanding,modelling and developing a smart stent which can resolve …
Published in Journal of Mechatronics and Automation · Vol. 9, Issue 2, 2022 · pp. 31–45 Read article
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A Study on Recent Trends in IC-Mems Integration
Abstract: MEMS devices are incorporated with IC technologies because of its miniature size, efficient functionality and broad range of applications. The technology involved is capable of integrating both electrical and mechanical systems. MEMS are nowadays used extensively in real time applications which outperforms other traditional designs with its innumerous advantages. This paper reviews the various implementation techniques of MEMS sensors integrated with IC’s. Electronic Vehicle Identification (EVI) is done with the …
Published in Recent Trends in Sensor Research & Technology · Vol. 8, Issue 1, 2021 Read article
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A Study On Mems Piezoresistive Pressure Sensor Design And Its Applications
Abstract: Easier and faster means of Pressure measurement is in utmost demand in Industries. MEMS piezoelectric pressure sensors can meet the claim due to its compactness and lightweight. The pressure measurement is purely application specific. The number of steps required to fabricate the MEMs sensor can be condensed if a proper selection of sensor is done. Based on the type of the piezoelectric materials used in the design, the shape of …
Published in Recent Trends in Electronics Communication Systems · Vol. 8, Issue 1, 2021 · pp. 18–23 Read article
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Study Effect of Position of Fixed Magnet on Performance of VEH Device Working on Electromagnetic Principal
Abstract: Vibration energy harvesting (VEH) is one of key source of power for remote locations. VEH device gives maximum output at its natural frequency matching with excitation frequency. So, it is suitable for standalone frequency, gives rise to increase band widening efforts. To achieve resonance, stiffness or moving mass is to be changed. Changing of mass during operation is difficult to achieve. Repulsive and attractive force between magnets can be varied …
Published in Journal of Telecommunication, Switching Systems and Networks · Vol. 4, Issue 1, 2017 · pp. 6–11 Read article
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Analysis of Pull-in Voltage with Respect to Changes in Dielectric Material and their Thickness
Abstract: Micro Electromechanical Systems (MEMS) actuators experience pull-in effect in their actuation range. MEMS actuating elements are thin parallel plate capacitor electrodes separated with air gap. Parallel plate electrostatic micro actuators are known to have the pull-in effect, where electrostatic attractive force exceeds the mechanical restoring force of the suspending spring, and that the movable plate spontaneously pulled into physical contact with the opposite electrode. In our model the effect of …
Published in Recent Trends in Electronics Communication Systems · Vol. 2, Issue 1, 2015 · pp. 1–5 Read article
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Development of Electrochemical Discharge Machine for Machining Non-conductive Materials
Abstract: Electrochemical discharge machining (ECDM) is the hybrid machining process combination of electrodischarge machining and electrochemical machining process. ECDM is different machining process for micro-drilling and micro-grooving of variety of glasses, ceramics and composites. Electrochemical discharge machining also called as spark assisted chemical engraving (SACE). ECDM process is an effective and micro-machining process for non-conductive materials. It is used in micro-electromechanical system (MEMS) applications. ECDM parameters are material removing rate (MRR), …
Published in Trends in Machine design · Vol. 6, Issue 3, 2019 · pp. 18–22 Read article
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Analysis of Thermally Actuated Micromirrors
Abstract: Use of microelectromechanical system (MEMS) to craft deformable mirror is in the embryonic stage. However, MEMS micromirrors hold significant advantages in speed, compactness, and economy in comparison to macroscale counterparts. The MEMS micromirrors are fabricated by silicon batch processing or micrometer scale lithographic pattering technique which offer flexibility in low volume manufacturing and inter batch variations. The project is a structural study and involves the modeling of various geometries for …
Published in Journal of Mechatronics and Automation · Vol. 6, Issue 3, 2019 · pp. 17–23 Read article
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Analysis of MEMS based Micro-hot Plate for Gas Sensor
Abstract: AbstractThe Micro-hot plate is the one of the key component of the gas sensor, which is used to achieve and control the high temperature to detect the various changes occurs at the sensing layer of the sensor. In this paper, three different types of geometry of micro hot plate such as single meander, double meander and modified spiral based Micro-hot plate using two different types of materials- platinum and titanium …
Published in Journal of Semiconductor Devices and Circuits · Vol. 6, Issue 2, 2019 · pp. 1–5 Read article
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Comparative Study of Microelectromechanical Switches for RF Applications: A Review
Abstract: Switches are very basic components for any communication application. The switch performance depends on their ability to allow a signal without loss and its speed of operation. In this paper, the different switches which are being used for RF application are presented along with their advantages and disadvantages. The main focus of this study is to provide comparative study about different microelectromechanical (MEMS) switches and also different techniques to improve …
Published in Journal of Semiconductor Devices and Circuits · Vol. 6, Issue 2, 2019 · pp. 6–12 Read article
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Aspects of Diamond-Like Carbon based MEMS and Microfluidic Devices
Abstract: In general, diamond-like carbon (DLC) is the hydrogenated amorphous carbon (a-C:H) to be used in the fabrication of micro electromechanical systems (MEMS) and microfluidic devices. Mukhopadhyay as author has recently demonstrated the variation of surface wettability in polymer based microchannels by the use of DLC. Also, DLC can be used as an anti-stiction coating in different applications. In this review, different features of DLC are briefly highlighted. This educational short …
Published in Journal of Petroleum Engineering & Technology · Vol. 8, Issue 1, 2018 · pp. 31–33 Read article