STM Journals Peer-reviewed research from Consortium e-Learning Network

Journal of Mechatronics and Automation

Analogous Electrical Modelling of Squeeze Film Damping in MEMS Accelerometers

  1. Robin Singh
  2. S. M. Kulkarni
  3. Jayaprakash Reddy

Abstract

Most of the MEMS (microelectromechanical systems) structures employ parallel plates or beams. A very thin film of air or some other gas in between their suspended structure and fixed substrate is trapped in between these plates. This results in squeeze film damping. Though, FEM (Finite element method) analysis is the most widely used method for studying the effects of the phenomenon, it becomes quite cumbersome and time consuming while analyzing the complex structures with different boundary conditions. Thus, it is important to find a better modelling strategy for it. In this paper, one of such modelling approach to implement squeeze film damping is discussed. An analogous electrical model for MEMS based accelerometers is proposed. The greatest advantage of the model is that it can be connected with electronic elements. The circuit is further analyzed to calculate various design parameters of the devices. The model is found to match the measured frequency responses at different boundary conditions in an encouraging way.

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