capacitive accelerometer
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Analogous Electrical Modelling of Squeeze Film Damping in MEMS Accelerometers
Abstract: Most of the MEMS (microelectromechanical systems) structures employ parallel plates or beams. A very thin film of air or some other gas in between their suspended structure and fixed substrate is trapped in between these plates. This results in squeeze film damping. Though, FEM (Finite element method) analysis is the most widely used method for studying the effects of the phenomenon, it becomes quite cumbersome and time consuming while analyzing …
Published in Journal of Mechatronics and Automation · Vol. 2, Issue 1, 2015 · pp. 1–9 Read article