In this work, the modelling and design of a Micro Electro Mechanical Systems (MEMS) uniaxial accelerometer has been presented. The design of the sensor includes sensing acceleration in the x-direction only. The device achieves this function using a proof mass suspended through four spring structure. The device dimensions are finalized mathematically and the simulated using Finite Element Analysis. The structure is simulated with and without piezoelectric material ZnO and a comparison is made between the devices. The device was designed for 1 KHz frequency and 20 g acceleration.Keywords: MEMS, accelerometer, ZnO, finite element analysis.
