2 publications

• Published Subscription 3 Jun 2016

  Mathematical Design and Simulation of MEMS based Acoustic Sensor

  By Diksha sharma, Arti Arora

  Abstract: This paperfocuses on design and simulation of MEMS Acoustic Sensor based on piezoelectriczinc oxide (ZnO) thin film using single crystal silicon wafer. The thickness ofsilicon diaphragm is 35 and the size of diaphragm is 3mm *3mm. Thepaper provides analysis and exhibit enhanced resonance frequency 51.058 KHz.

  Published in Recent Trends in Sensor Research & Technology · Vol. 3, Issue 1, 2016 · pp. 10–13 Read article →

• Published Subscription 25 Sep 2014

  Design and Simulation of MEMS-based Piezoelectric Accelerometer

  By Arti Arora, Anil Arora, Himanshu Monga

  Abstract: In this work, the modelling and design of a Micro Electro Mechanical Systems (MEMS) uniaxial accelerometer has been presented. The design of the sensor includes sensing acceleration in the x-direction only. The device achieves this function using a proof mass suspended through four spring structure. The device dimensions are finalized mathematically and the simulated using Finite Element Analysis. The structure is simulated with and without piezoelectric material ZnO and a …

  Published in Recent Trends in Sensor Research & Technology · Vol. 1, Issue 2, 2014 · pp. 16–19 Read article →