STM Journals Peer-reviewed research from Consortium e-Learning Network

Recent Trends in Sensor Research & Technology

Design and Simulation of Microcantilevers for Sensing Applications

  1. Anuj Kumar Goel ORCID iD
  2. Kuldip Pahwa
  3. Dushyant Gupta

Abstract

MEMS is the integration of active and passive elements on a single chip, which combines electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology is used in sensing applications with the use of basic mechanical elements such as microcantilevers, beams, diaphragms, springs, gears and so on. In this research paper, microcantilevers are used as basic elements for designing sensors. This paper shows the design and simulation of microcantilevers with static loads and respective variations in different parameters.Keywords: MEMS, microcantilevers, actuation, sensingCite this ArticleAnuj Kumal Goel, Kuldip Pahwa, Dushyant Gupta. Design and Simulation of Microcantilevers for Sensing Applications. Recent Trends in Sensor Research and Technology. 2016; 3(1): 21–24p.
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