1 publication

• Published Subscription 3 Jun 2016

  Design and Simulation of Microcantilevers for Sensing Applications

  By Anuj Kumar Goel, Kuldip Pahwa, Dushyant Gupta

  Abstract: MEMS is the integration of active and passive elements on a single chip, which combines electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology is used in sensing applications with the use of basic mechanical elements such as microcantilevers, beams, diaphragms, springs, gears and so on. In this research paper, microcantilevers are used as basic elements for designing sensors. This paper shows the design …

  Published in Recent Trends in Sensor Research & Technology · Vol. 3, Issue 1, 2016 · pp. 21–24 Read article →