1 publication

• Published Subscription 25 Sep 2014

  Design and Simulation of MEMS-based Piezoelectric Accelerometer

  By Arti Arora, Anil Arora, Himanshu Monga

  Abstract: In this work, the modelling and design of a Micro Electro Mechanical Systems (MEMS) uniaxial accelerometer has been presented. The design of the sensor includes sensing acceleration in the x-direction only. The device achieves this function using a proof mass suspended through four spring structure. The device dimensions are finalized mathematically and the simulated using Finite Element Analysis. The structure is simulated with and without piezoelectric material ZnO and a …

  Published in Recent Trends in Sensor Research & Technology · Vol. 1, Issue 2, 2014 · pp. 16–19 Read article →