A Study On Mems Piezoresistive Pressure Sensor Design And Its Applications

Baby Chithra R; Varsha S N

Abstract

Easier and faster means of Pressure measurement is in utmost demand in Industries. MEMS piezoelectric pressure sensors can meet the claim due to its compactness and lightweight. The pressure measurement is purely application specific. The number of steps required to fabricate the MEMs sensor can be condensed if a proper selection of sensor is done. Based on the type of the piezoelectric materials used in the design, the shape of diaphragm, the kind of material used as diaphragm, the static characteristics like sensitivity, repeatability, linearity of the Peizoelectric sensor, it can be utilized in the pressure measurement of various capacity. Numerous parameters of the piezoelectric pressure sensor is analysed in this paper. Sensitivity of pressure measurement is based on the piezoresistive effect. COMSOL multiphysics software is suitable in the design of diaphragm. Minimization of mean passivity leads to high linearity. Several design illustrations are studied in this paper in order to analyse the linearity. When the thickness of the diaphragm is less than 1000µm, the increasing output voltage shows linear variants. Improved sensitivity can be achieved by the subsequent methods like Silicon Germanium as the superlative material, by optimizing the membrane thickness and also by sandwitching SOI layer between silicon dioxide at the higher part of the diaphragm. Carbon Nanotube (CNT) that holds over a square diaphragm increases the repeatability when castoff as a piezoresistor.

Abstract

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