pressure and sessitivity
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A Study On Mems Piezoresistive Pressure Sensor Design And Its Applications
Abstract: Easier and faster means of Pressure measurement is in utmost demand in Industries. MEMS piezoelectric pressure sensors can meet the claim due to its compactness and lightweight. The pressure measurement is purely application specific. The number of steps required to fabricate the MEMs sensor can be condensed if a proper selection of sensor is done. Based on the type of the piezoelectric materials used in the design, the shape of …
Published in Recent Trends in Electronics Communication Systems · Vol. 8, Issue 1, 2021 · pp. 18–23 Read article