2 publications
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A Study on Recent Trends in IC-Mems IntegrationBy Shivani B, Swetha Vura, Baby Chithra R
Abstract: MEMS devices are incorporated with IC technologies because of its miniature size, efficient functionality and broad range of applications. The technology involved is capable of integrating both electrical and mechanical systems. MEMS are nowadays used extensively in real time applications which outperforms other traditional designs with its innumerous advantages. This paper reviews the various implementation techniques of MEMS sensors integrated with IC’s. Electronic Vehicle Identification (EVI) is done with the …
Published in Recent Trends in Sensor Research & Technology · Vol. 8, Issue 1, 2021 Read article →
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A Study On Mems Piezoresistive Pressure Sensor Design And Its ApplicationsBy Baby Chithra R, Varsha S N
Abstract: Easier and faster means of Pressure measurement is in utmost demand in Industries. MEMS piezoelectric pressure sensors can meet the claim due to its compactness and lightweight. The pressure measurement is purely application specific. The number of steps required to fabricate the MEMs sensor can be condensed if a proper selection of sensor is done. Based on the type of the piezoelectric materials used in the design, the shape of …
Published in Recent Trends in Electronics Communication Systems · Vol. 8, Issue 1, 2021 · pp. 18–23 Read article →