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Recent Trends in Electronics Communication Systems

Analysis of Pull-in Voltage with Respect to Changes in Dielectric Material and their Thickness

  1. Shivashankar Huddar
  2. B.G. Sheeparamatti
  3. Pooja Patil
  4. Girija Hallikeri
  5. Vishal Hampannavar

Abstract

Micro Electromechanical Systems (MEMS) actuators experience pull-in effect in their actuation range. MEMS actuating elements are thin parallel plate capacitor electrodes separated with air gap. Parallel plate electrostatic micro actuators are known to have the pull-in effect, where electrostatic attractive force exceeds the mechanical restoring force of the suspending spring, and that the movable plate spontaneously pulled into physical contact with the opposite electrode. In our model the effect of dielectric layer thickness is taken into account for predicting the pull-in voltage. The critical role of different dielectric layer materials in bringing down the static pull-in voltage is verified by using COMSOL.

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