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5 articles for “electrostatic actuation”
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Analysis of MEMS Electrostatic Actuator using SIMULINK Software Tool
Abstract: The study includes Micro-Electro-Mechanical System (MEMS) electrostatic actuator using SIMULINK software tool considering equivalent mathematical model. This paper deals with the equation of motion, electrostatic force for the analysis of pull in voltage and displacement of an electrostatic cantilever with respect to the changes in applied force (voltage). Considering these equation, we have developed SIMULINK model to analyze pull in voltage, and displacement for the various applied input voltage.Keywords: MEMS, …
Published in Journal of Instrumentation Technology & Innovations · Vol. 5, Issue 1, 2015 · pp. 32–35 Read article
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Simulation of Electrostatic Microactuator with Two-Sided Electrodes
Abstract: Microcantilevers are the basic MEMS structures, which can be used as both sensors and actuators. The objective of this work is to study the concept of two-way deflection of the cantilever due to applied voltage and the ground. The proposed work is carried out by using Comsol/Multiphysics software which is based on the finite element method (FEM). The proposed work is modeled and simulated by selecting electromechanics as the physics …
Published in Journal of Mechatronics and Automation · Vol. 2, Issue 1, 2015 · pp. 10–15 Read article
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Recent Developments in MEMS Speaker Technology
Abstract: A sizable market with respect to portable audio calls for greater demand in MEMS speaker technology and manufacturing. A proper selection of electrostatic/electromagnetic actuators in a MEMS speaker gives rise to improved electromechanical efficiency. Summarizing the most recent developments could help in understanding the current technology and its scope. In this paper, several design selections and various types of MEMS speakers which are integrated with necessary components and circuitry in …
Published in Journal of VLSI Design Tools and Technology · Vol. 11, Issue 1, 2021 · pp. 29–34 Read article
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Analysis of Pull-in Voltage with Respect to Changes in Dielectric Material and their Thickness
Abstract: Micro Electromechanical Systems (MEMS) actuators experience pull-in effect in their actuation range. MEMS actuating elements are thin parallel plate capacitor electrodes separated with air gap. Parallel plate electrostatic micro actuators are known to have the pull-in effect, where electrostatic attractive force exceeds the mechanical restoring force of the suspending spring, and that the movable plate spontaneously pulled into physical contact with the opposite electrode. In our model the effect of …
Published in Recent Trends in Electronics Communication Systems · Vol. 2, Issue 1, 2015 · pp. 1–5 Read article
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Dielectric Polymer Based Tunable Bandpass Filter for RF MEMS Applications
Abstract: In this paper, we report on the design, modeling, and analysis of a tunable bandpass filter implemented in a coplanar waveguide (CPW) configuration, where a distributed MEMS transmission line (DMTL) is integrated with dielectric polymer layers to achieve dynamic frequency and bandwidth reconfigurability. The proposed filter architecture leverages the tunable dielectric response of polymer films, enabling precise control of the center frequency and passband width under applied electrostatic bias. Comprehensive …
Published in Journal of Polymer & Composites · Vol. 14, Issue 1, 2026 · pp. 1449–1470 Read article