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Recent Trends in Sensor Research & Technology

A Study on Recent Trends in IC-Mems Integration

  1. Shivani B
  2. Swetha Vura
  3. Baby Chithra R

Abstract

MEMS devices are incorporated with IC technologies because of its miniature size, efficient functionality and broad range of applications. The technology involved is capable of integrating both electrical and mechanical systems. MEMS are nowadays used extensively in real time applications which outperforms other traditional designs with its innumerous advantages. This paper reviews the various implementation techniques of MEMS sensors integrated with IC’s. Electronic Vehicle Identification (EVI) is done with the help of MEMs integrated systems which gives rise to the protection of vehicle from theft and other illegal selling of vehicles. Motion alarming sensitivity is analyzed in this study. A study on humidity sensor performance reveals that capacitive humidity sensors are less sensitive and consumes low power whereas Vertical Parallel Plate sensors (VPP) along with M1,M4,M5 extracts high sensitivity. Integration of Relative Humidity (RH) sensors improves the response time. The review is also contented on Magnetic measurements, thermal stress, inertial device characteristics, and residual stress using Raman spectroscopy as a part of IC-MEMs integration.

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