1 publication

• Published Subscription 16 Jun 2021

  A Study on Recent Trends in IC-Mems Integration

  By Shivani B, Swetha Vura, Baby Chithra R

  Abstract: MEMS devices are incorporated with IC technologies because of its miniature size, efficient functionality and broad range of applications. The technology involved is capable of integrating both electrical and mechanical systems. MEMS are nowadays used extensively in real time applications which outperforms other traditional designs with its innumerous advantages. This paper reviews the various implementation techniques of MEMS sensors integrated with IC’s. Electronic Vehicle Identification (EVI) is done with the …

  Published in Recent Trends in Sensor Research & Technology · Vol. 8, Issue 1, 2021 Read article →