STM Journals Peer-reviewed research from Consortium e-Learning Network

Journal of Electronic Design Technology

On-Wafer Calibration of Vector Network Analyzer – Fabrication of LRM Calibration Standard

  1. Nishtha Chopra
  2. Dr. S. K. Koul
  3. M. U. Sharma

Abstract

Vector network analyzer or VNA has become ascendant of most measuring networks above 1 GHz. These networks consist of various manufacturing defects (due to resistance, capacitance and inductance) including VNA errors. To measure these errors, VNA was calibrated using a calibration kit. The usage of this calibration kit squanders a lot of time and money; moreover, the results are not accurate. To avoid this, the concept of on-wafer calibration is introduced, wherein calibration patterns are developed on a wafer and hence connected to specially designed RF probes to calibrate VNA.
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