CuxO
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Electrical Properties of Nanocrystalline CuxO Thin Films Prepared by r. f. Sputtering Method
Abstract: Normal 0 Nanocrystalline CuxO (0 < x < 1) thin films have been synthesized using r. f. sputtering method at different r. f. power in an atmosphere of O2 and Ar. The effect of varying r. f. power, oxygen partial pressure and film thickness during deposition on the crystal size and electrical properties of CuxO thin films have been studied. The films were characterized by X-ray diffraction (XRD), transmission electron …
Published in Journal of Nanoscience, NanoEngineering & Applications · Vol. 3, Issue 2, 2013 · pp. 30–37 Read article