The Impact of MEMS on the Internet of Things (IoT)

sakshi tyagi

doi:10.37591/tmet.v12i3.6997

Abstract

Our daily lives, workdays, and connections with the external world are all being impacted by theInternet of Things (IoT). Micro Electro-Mechanical Systems (MEMS) are tiny, economical, andpretty accurate sensors that can measure a variety of physical variables, including temperature,pressure, humidity, acceleration, and more. They are a fundamental enabler of this technology. Inthis article, we examine the effects of MEMS on the IoT and the ways in which these incrediblysmall sensors are promoting the expansion and advancement of the IoT ecosystem. A hugenumber of tiny, cheap, and low-power sensors and actuators are essential to the quickdevelopment of 5th mobile networks (5G) and the Internet of Things (IoT). A adaptable platformfor a collection of high-performance sensors, actuators, energy harvesters, filters, and oscillatorsis provided by piezoelectric microelectromechanical system (MEMS) devices made usingmicromachining techniques (main building blocks in radio frequency front ends for wirelesscommunication). The functions, structural layout, and wide range of applications of piezoelectricMEMS devices are all comprehensively reviewed in this paper. In order to deal with applicationsin physical, chemical, and biological sensing, a variety of piezoelectric Mems devices contactand non-contact—are first described. A discussion of the developments in piezoelectric MEMSactuators for different application scenarios follows here. Piezoelectric MEMS energy collectors,that can power other MEMS devices, are methodically listed at present. Lamb wave resonatorsare also demonstrated with a variety of performance modifications as a representative ofpiezoelectric resonators. Finally, the development tendencies of piezoelectric MEMS devices forimplanted and wearable applications are discussed.

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