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3 articles for “electrostatic cantilever”
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Analysis of Pull-in Voltage with Respect to Changes in Dielectric Material and their Thickness
Abstract: Micro Electromechanical Systems (MEMS) actuators experience pull-in effect in their actuation range. MEMS actuating elements are thin parallel plate capacitor electrodes separated with air gap. Parallel plate electrostatic micro actuators are known to have the pull-in effect, where electrostatic attractive force exceeds the mechanical restoring force of the suspending spring, and that the movable plate spontaneously pulled into physical contact with the opposite electrode. In our model the effect of …
Published in Recent Trends in Electronics Communication Systems · Vol. 2, Issue 1, 2015 · pp. 1–5 Read article
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Analysis of MEMS Electrostatic Actuator using SIMULINK Software Tool
Abstract: The study includes Micro-Electro-Mechanical System (MEMS) electrostatic actuator using SIMULINK software tool considering equivalent mathematical model. This paper deals with the equation of motion, electrostatic force for the analysis of pull in voltage and displacement of an electrostatic cantilever with respect to the changes in applied force (voltage). Considering these equation, we have developed SIMULINK model to analyze pull in voltage, and displacement for the various applied input voltage.Keywords: MEMS, …
Published in Journal of Instrumentation Technology & Innovations · Vol. 5, Issue 1, 2015 · pp. 32–35 Read article
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Simulation of Electrostatic Microactuator with Two-Sided Electrodes
Abstract: Microcantilevers are the basic MEMS structures, which can be used as both sensors and actuators. The objective of this work is to study the concept of two-way deflection of the cantilever due to applied voltage and the ground. The proposed work is carried out by using Comsol/Multiphysics software which is based on the finite element method (FEM). The proposed work is modeled and simulated by selecting electromechanics as the physics …
Published in Journal of Mechatronics and Automation · Vol. 2, Issue 1, 2015 · pp. 10–15 Read article