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2 articles for “Excimers”
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ULTRAFAST LASERS AND ITS USE IN ELECTRONICS INDUSTRY
Abstract: The size of semiconductors and packaged devices continues to shrink enabling the devices to become more compact . This trend requires the deployment of sophisticated equipments with inbuilt lasers that have unique capability to process diverse materials with high precision , but without damaging the electronic components due to heat . There are diverse laser technologies utilising longer pulse width or ultrashort pulse (USP) width that are employed in electronic …
Published in Journal of Semiconductor Devices and Circuits · Vol. 8, Issue 2, 2021 · pp. 34–45 Read article
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Automatic Laser Propulsion Using Binary Mask
Abstract: In the mask propulsion, excimer laser micromachining using binary propulsion has been implemented for flash patterning of a monomicrometer features over wide areas of various substrates. The limit for depth of focus that determines the depth to width front ratios is given and demonstrated for different materials. Binary mask propulsion technique is found to harmonize to reproduce the mask features from the millimeter to the micrometer scale under peculiar focusing …
Published in Journal of Microcontroller Engineering and Applications · Vol. 4, Issue 2, 2017 · pp. 29–36 Read article