SU-8 has the high aspect ratio, good pattern ability property, mechanical and chemical stability. The energy harvester structure is made of SU-8 as substrate and zinc oxide as the piezoelectric layer. The optimal dimension is found out to be 500 µm×20 µm×3 µm. The simulation shows that for input 10 N/m2 at the frequency of resonance of the structure, the energy harvester generates 13.1 mV. Keywords: Zinc Oxide (ZnO), cantilever beam, SU-8, resonance frequencyCite this Article Rajashekhar Savadi, Mallikrjun, Shivshankar Huddar, Sheeparamatti BG. Design and Simulation of Piezoelectric Energy Harvester. Journal of Mechatronics and Automation. 2015; 2(1): 17–20p.
