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    Design and Simulation of Piezoelectric Energy Harvester

    Abstract: SU-8 has the high aspect ratio, good pattern ability property, mechanical and chemical stability. The energy harvester structure is made of SU-8 as substrate and zinc oxide as the piezoelectric layer. The optimal dimension is found out to be 500 µm×20 µm×3 µm. The simulation shows that for input 10 N/m2 at the frequency of resonance of the structure, the energy harvester generates 13.1 mV. Keywords: Zinc Oxide (ZnO), cantilever …

    Published in Recent Trends in Sensor Research & Technology · Vol. 2, Issue 1, 2015 · pp. 17–20 Read article

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