Virtual Instrument Programming
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Quartz Crystal for Thin Film Thickness Measurement using Embedded Software (PSoC)
Abstract: Programmable System on Chip (PSoC) based embedded read-out design for Quartz crystal which measures thickness of a thin film during deposition has been describe in this paper. Excited quartz sensor to its resonance frequency of 5 MHz, kept nearby the substrate measures the deposited film thickness by monitoring change in quartz resonance frequency. The change in the quartz crystal resonance frequency due to deposition decreases linearly with thickness. The change …
Published in Research & Reviews: A Journal of Embedded System & Applications · Vol. 1, Issue 3, 2013 · pp. 17–23 Read article