vapor deposition
1 article · search the full text for this term
-
Thin Film Technology in Sensor Manufacturing – A Technical Discussion
Abstract: Thin‑film technology has become the cornerstone of modern sensor manufacturing, enabling the convergence of miniaturisation, multifunctionality, and cost‑effective mass production. This paper surveys the latest advances in deposition techniques—ranging from magnetron sputtering and chemical vapour deposition to atomic‑layer deposition (ALD) and ink‑jet‑printed sol‑gel processes—and examines how their unique material‑control capabilities translate into performance gains across the sensor spectrum (chemical, physical, and bio‑sensing). By integrating nanoscale thickness control (≤ 10 nm) …
Published in Journal of Thin Films, Coating Science Technology & Application · Vol. 13, Issue 1, 2026 · pp. 48–58 Read article