SiO₂ coatings
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Characterization Techniques for Thin Film Coatings Based on SiO₂, TiO₂, and ZrO₂
Abstract: Thin film coatings made from silicon dioxide (SiO₂), titanium dioxide (TiO₂) and zirconium dioxide (ZrO₂) have attracted great interest owing to their excellent optical, electrical, mechanical and chemical properties. These oxide thin films are widely used in microelectronics, solar cells, sensors, biomedical devices, photocatalysis, anti-reflective coatings and protective layers. The structural, morphological, compositional, optical and mechanical properties of these coatings are closely related to their performance and reliability. Therefore, thorough …
Published in Journal of Materials & Metallurgical Engineering · Vol. 16, Issue 2, 2026 Read article