R.F. sputtering
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Opto-electrical and Structural Properties of CuxO Thin Films grown by R. F. Sputtering Method
Abstract: CuxO (0<x<1) thin films were deposited on glass substrate by r. f. sputtering method at different r. f. power in an atmosphere of O2 and Ar. The conditions for deposition of CuxO thin film were optimized by varying the r. f. power for the deposition to vary the energy band gap of the deposited film. Structural characterizations were performed by XRD and TEM studies. The films deposited on glass substrate …
Published in Journal of Alternate Energy Sources & Technologies · Vol. 2, Issue 1, 2011 Read article