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Analysis of Thermally Actuated Micromirrors
Abstract: Use of microelectromechanical system (MEMS) to craft deformable mirror is in the embryonic stage. However, MEMS micromirrors hold significant advantages in speed, compactness, and economy in comparison to macroscale counterparts. The MEMS micromirrors are fabricated by silicon batch processing or micrometer scale lithographic pattering technique which offer flexibility in low volume manufacturing and inter batch variations. The project is a structural study and involves the modeling of various geometries for …
Published in Journal of Mechatronics and Automation · Vol. 6, Issue 3, 2019 · pp. 17–23 Read article