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Performance Analysis of MEMS-based Ultrasonic Transducer with Different Membrane Materials
Abstract: Microelectromechanical systems (MEMS)-based capacitive micromachined ultrasonic transducer (CMUT) follows the reciprocity principle in the same way as piezoelectric transducers and has proven to be a good alternative to conventional piezoelectric transducers in many aspects such as sensitivity, transduction efficiency and bandwidth. CMUT transducers like piezoelectric transducers operate on resonance frequency to get possible ultrasound output, and high sensitivity in reception. The performance of the CMUT is highly affected by material …
Published in Recent Trends in Sensor Research & Technology · Vol. 1, Issue 3, 2014 · pp. 1–9 Read article