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Parametric Optimization and Stiffness Determination of XY Positioning Stage for High Precision Applications
Abstract: In micro-electro-mechanical system (MEMS) flexural mechanisms are widely used because of their advantages such as frictionless and wear less motion and high precision. Flexures depend on material elasticity for their functionality. In flexure mechanism, motion is generated due to elastic deformation of the beam from which it is made. One of the typical advantages of flexural mechanism is to gain precise deformation and flexibility to obtain motion in desired direction. …
Published in Journal of Experimental & Applied Mechanics · Vol. 7, Issue 2, 2016 · pp. 66–73 Read article