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3 articles for “silicon nitride films”
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Detailed Study On Physical Properties Of Silicon Nitride Films Deposited By Plasma Enhanced Chemical Vapour Deposition System
Abstract: Amorphous silicon nitride films have been deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) technique using silane (SiH4) and ammonia (NH3) as source gases. Investigations have been made in detail to understand the influence of process parameters such as RF power, substrate temperature, gas flow ratio, working pressure etc, on the optical, electrical and surface properties in order to obtain dielectric Si3N4 films for semiconductor device applications. Amorphous …
Published in Journal of Thin Films, Coating Science Technology & Application · Vol. 3, Issue 1, 2016 · pp. 1–8 Read article
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Thin-Film Quantum Photonic Technologies for Quantum Teleportation
Abstract: One of the most important protocols in distributed quantum computing and quantum communication is quantum teleportation, which allows quantum information to be sent between distant nodes without actually sending the quantum particle. The teleportation process is fundamentally based on quantum entanglement, Bell state measurements, and classical communication channels, which collectively allow the accurate reconstruction of an unknown quantum state at a remote location. In recent years, rapid progress in integrated …
Published in Journal of Thin Films, Coating Science Technology & Application · Vol. 13, Issue 2, 2026 · pp. 01–19 Read article
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Hard and Wear-Resistant Nanocomposite Thin Film Coatings
Abstract: Recent advancements in the hard and wear-resistant protective coatings have made high speed machining increasingly viable in the industries. The nanocomposite coatings have immense applications today in dry and high speed machining due their high wear resistance and high oxidation resistance properties. The high oxidation and wear resistance properties are obtained by addition of fourth element such as silicon to tertiary transition metal nitride compounds. In this work, a review …
Published in Journal of Thin Films, Coating Science Technology & Application · Vol. 2, Issue 3, 2015 · pp. 28–32 Read article