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1 article for “cross axis flaw”
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Nano Positioning for Large Scanning Range for XY Mechanism
Abstract: In this study, an XY flexure stage that provides a variety of motion options while reducing incorrect motions is designed and assessed. In the flexure design, the double parallelogram flexure modules are positioned methodically and symmetrically. The performance of the flexure stage is assessed using finite element analysis, and experimental testing is performed to validate the findings. The built-in prototype of the flexure stage has dimensions of 350 mm x …
Published in Journal of Microelectronics and Solid State Devices · Vol. 12, Issue 1, 2025 · pp. 30–35 Read article