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1 article for “Semiconductor Strain Measurement”
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Principles and Use of Analytical Transmission Electron Microscope
Abstract: At the beginning of the review the analytical Transmission Electron Microscope is introduced. Equipment, imaging, diffraction and use of analytical TEM are described. Electron path under magnetic lens is delineated, emphasizing the lens aberrations, diffraction, astigmatism and gun brightness. Selected area electron diffraction patterns of Al-Cu and Inconel super alloy are used to index crystallographic planes and to derive zone direction while basic sources of diffraction contrast are depicted using …
Published in Journal of Materials & Metallurgical Engineering · Vol. 9, Issue 3, 2019 · pp. 27–49 Read article