This paper presents nonlinear dynamic analysis of electro-statically actuated micro-resonator under squeeze-film damping conditions. By considering a single degree-of-freedom oscillator model of resonator with squeeze-film damping effects, nonlinear phenomena are investigated. Numerical studies are conducted using phase portrait and Poincare map over a range of AC voltage amplitudes to predict the dynamic pull-in state. The effects of AC harmonic frequency and ambient pressure on beam dynamics have also been studied. A control algorithm is shown for converting the chaotic oscillations into periodic signals. Numerical simulations show the importance of accounting damping terms in equations of motion. Keywords: MEMS resonator, Squeeze-film damping, nonlinear dynamics, Neuro-controllerCite this Article Ashish Kumar Gurjar, J. Srinivas, Nonlinear Dynamics of MEMS Resonator with Squeeze-Film Damping, Recent Trends in Sensor Research and Technology. 2015; 2(2): 1–5p.
