In this paper, the authors present the activities within their research group on increasing the sensitivity of microcantilever of SU-8/2050. They believe that SU-8 is an interesting polymer for fabrication of cantilevers for biosensing due to its simple processing and low Young’s modulus. They show that the SU-8 cantilever surface can be functionalized directly with receptor molecules for analyte detection, thereby avoiding gold layer. To increase the overall sensitivity of microcantilever biosensors, the maximum deflection of microcantilever need to be achieved. The deflection depends upon the amount of bioreceptors deposited on top surface of microcantilever and the amount of receptors considered as force in µN. The cantilevers are made of SU-8/2050 with elastic modulus 2 GPa and Poisson’s ratio 0.22. To show the conformity of this study, the simulation is carried out by COMSOL Multiphysics and ANSYS Multiphysics. The authors have also shown that SU-8 material is having higher deflection value compared to Silicon. Keywords: Microcantilever, SU-8/2050, biosensor, deflection, COMSOL, ANSYS
