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Design and Simulation of Micro-cantilever for MEMS ApplicationsBy Tanvi Chandel, Balwinder Singh
Abstract: Micro-cantilevers belong to MEMS set of devices and are often used for detection of forces in micromechanical sensors (e.g., pressure sensors and accelerometers) and probe for force sensor to atomic force microscope used as transducers, transport mechanisms, relays, switches, resonators, etc. This paper presents as to how the displacement of micro-cantilever is affected by the load applied to the micro-cantilever. The effect of width change on the displacement of the …
Published in Journal of Electronic Design Technology · Vol. 5, Issue 2, 2014 · pp. 25–31 Read article →