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Micro-cantilever Sensors for Efficient Gas SensingBy Sukumar Basu, Deepika Saxena, Arnab Hazra
Abstract: AbstractMicro-cantilever has been progressively used for the development of miniaturized sensors for gas sensing, biochemical analysis, medical applications and quality and process control. Micro-cantilevers are fabricated with rectangular silicon slabs having thickness below 1 µm. For gas sensing applications, Si cantilever surface is modified with appropriate sensing materials for selective adsorption of gas/vapor or biomolecules. The bending of the cantilever due to different surface conditions is measured with laser beam …
Published in Journal of Semiconductor Devices and Circuits · Vol. 6, Issue 3, 2019 · pp. 16–24 Read article →