1 publication

• Published Subscription 21 May 2015

  Design of MEMS Based Microheater for Enhanced Efficiency of Gas Sensors

  By Mayank Dhull, Anil Arora

  Abstract: MEMS based microheaters play an important role in gas sensors. In gas sensors adsorption property of gas sensitive material at elevated temperature is used. For this purpose the microheater should provide uniform heating throughout the sensing surface. This paper describes the structural design and electrothermal analysis of microheater. In this paper, the optimization of the heater geometries is done to obtain better temperature uniformity. Two heater geometries wiz, S-shape and …

  Published in Journal of Thermal Engineering and Applications · Vol. 2, Issue 2, 2015 · pp. 16–21 Read article →