1 publication

• Published Subscription 26 Nov 2015

  Optimization of i-Layer of a-Si: H p–i–n Solar Cell in an Indigenously Developed PECVD System

  By Shilpa G D, Sreedhar Babu K, Subramanyam TK, Suresh R

  Abstract: Single-junction hydrogenated amorphous silicon solar cells have been successfully fabricated using indigenously developed radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD) technique. The software-controlled PECVD system enables deposition and optimization of layers and solar cell device using a cluster 5 process chambers. In the present work, several experiments have been carried out by varying the critical process parameters in order to optimize the i-layers for obtaining efficient hydrogenated amorphous silicon (a-Si:H) …

  Published in Journal of Instrumentation Technology & Innovations · Vol. 5, Issue 3, 2015 · pp. 32–36 Read article →