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• Published Subscription 16 Jan 2015

  Virtual Prototyping and Beam Optimization of Resonant Micro Pressure Sensors

  By S Meenatchisundaram, S M Kulkarni, Somashekara Bhat

  Abstract: The overall performance of a resonant beam micro pressure sensor largely depends on the mechanical aspects of the beam. Mechanical features include the geometry of the micro beam, its support structure and position of the beam on the diaphragm. The aim of this paper is to virtually prototype and analyzes the characteristics of a resonant beam micro pressure sensor and optimizes the beam geometry in terms of linearity and sensitivity. …

  Published in Recent Trends in Sensor Research & Technology · Vol. 1, Issue 3, 2014 · pp. 10–16 Read article →