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Design and Simulation of a MEMS Piezoresistive Floating Element Shear Stress SensorBy Nevin Augustine, G. Uma, M. Umpathy
Abstract: The paper presents the modelling, simulation and comparison of a MEMS piezoresistive (PZR) floating element shear stress sensor with various dimensions which has potential applications in underwater measurements. The floating element design utilizes a plate element of small mass suspended by four tethers. PZR patches are implanted at the root of the tethers. Shear stress is inferred by the deflection in the tethers and the corresponding change in the resistance …
Published in Recent Trends in Sensor Research & Technology · Vol. 2, Issue 1, 2015 · pp. 11–16 Read article →