1 publication
-
Published Subscription
Studies on the enhancement of sensitivity in SOI-MEMS Piezoelectric Accelerometer for low frequency applicationsBy Dr. Daisy Rani Alli, Dr.D.V.Rama Koti Reddy, Rajendra Prasad Kalapala
Abstract: In the present paper the design, fabrication and characterization of the SOI-MEMS piezoelectric accelerometer is reported. MEMS Accelerometers developed by many researchers in the literature have achieved the necessary high sensitivity at high frequencies. The main challenge of this work is to design an accelerometer with high sensitivity at low frequencies. The analytical modeling and FEM analysis were performed on the device to arrive at the optimized design of the …
Published in Nano Trends – A Journal of Nano Technology & Its Applications · Vol. 20, Issue 1, 2018 · pp. 42–52 Read article →