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• Published Subscription 2 Aug 2023

  Simulation of Electrostatic Microactuator with Two-Sided Electrodes

  By B. G. Sheeparamatti, M. N Patil, Prashant D. Hanasi

  Abstract: Microcantilevers are the basic MEMS structures, which can be used as both sensors and actuators. The objective of this work is to study the concept of two-way deflection of the cantilever due to applied voltage and the ground. The proposed work is carried out by using Comsol/Multiphysics software which is based on the finite element method (FEM). The proposed work is modeled and simulated by selecting electromechanics as the physics …

  Published in Journal of Mechatronics and Automation · Vol. 2, Issue 1, 2015 · pp. 10–15 Read article →